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Journal: Micro, 2024
Volume: 4
Number: 30

Article: The Design, Simulation, and Parametric Optimization of an RF MEMS Variable Capacitor with an S-Shaped Beam
Authors: by Shakila Shaheen, Tughrul Arslan and Peter Lomax
Link: https://www.mdpi.com/2673-8023/4/3/30

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