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Journal: Proceedings, 2024
Volume: 97
Number: 44
Article:
Fabrication of Wafer-Level Vacuum-Packaged 3C-SiC Resonators with Q-Factor above 250,000
Authors:
by
Sergio Sapienza, Luca Belsito, Matteo Ferri, Ivan Elmi, Marcin Zielinski, Francesco La Via and Alberto Roncaglia
Link:
https://www.mdpi.com/2504-3900/97/1/44
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