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Journal: Proceedings, 2018
Volume: 2
Number: 838
Article:
Silicon Microcantilevers with ZnO Nanorods/Chitosan-SAMs Hybrids on Its Back Surface for Humidity Sensing
Authors:
by
Jiushuai Xu, Maik Bertke, Xuejing Li, Andi Setiono, Michael Fahrbach, Angelika Schmidt and Erwin Peiner
Link:
https://www.mdpi.com/2504-3900/2/13/838
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