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Proceedings 2017, 1(4), 586;

Design and Optimization of Wideband Multimode Piezoelectric MEMS Vibration Energy Harvesters

Department of Electrical and Computer Engineering, Faculty of Engineering and Applied Science, Memorial University of Newfoundland, St. John’s, NL A1B 3X9, Canada
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 4 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
PDF [505 KB, uploaded 4 September 2017]


To enlarge operating frequency bandwidth of the multimode energy harvesters, nonlinearity characteristics has to be well presented by the system configuration. Therefore, the conventional optimization techniques, which are solely based on human observation, are highly difficult and somehow impossible. In this paper we propose an efficient optimization technique for automating the design of nonlinear piezoelectric MEMS energy harvesters based on Genetic Algorithm (GA) with minimum human efforts. In this regard, a MEMS piezoelectric harvester with capability of operating at multimode is proposed and a GA-based optimization methodology is utilized to shift its operational modes close to each other by optimizing device physical aspects. The experiments on post-optimization resonant frequencies show that our proposed optimization methodology is able to reduce the resonant frequencies by 13%, 10% and 9.5% for the first, second and third modes, respectively. In addition, the numerical simulation shows that our optimized energy harvester with a total chip area of 16-mm2 is able to maximally generate 655 mV, 80 mV and 572 mV at the first (153 Hz), second (168 Hz) and third (219 Hz) modes, respectively under 1 g vibration.
Keywords: MEMS harvesters; wideband; multimode; optimization; genetic algorithm MEMS harvesters; wideband; multimode; optimization; genetic algorithm
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Nabavi, S.; Zhang, L. Design and Optimization of Wideband Multimode Piezoelectric MEMS Vibration Energy Harvesters. Proceedings 2017, 1, 586.

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