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Journal: Proceedings, 2017
Volume: 1
Number: 379
Article:
High Accuracy MEMS Pressure Sensor Based on Quartz Crystal Resonator
Authors:
by
J. Wang, C. Zhao, D. X. Han, X. F. Jin, S. M. Zhang, J. B. Zou, M. M. Wang, W. B. Li and Y. B. Guo
Link:
https://www.mdpi.com/2504-3900/1/4/379
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