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Journal: ProceedingsVolume: 1Number: 375
Article: Nanomechanical Traceable Metrology of Vertically Aligned Silicon and Germanium Nanowires by Nanoindentation
- Authors:
- Gerry Hamdana1,2,*,
- Tony Granz1,2 and
- Maik Bertke1,2
- et al.
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