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Proceedings 2017, 1(4), 343;

MEMS Inertial Switch for Military Applications

Agency for Defence Development, Daejeon, Korea
Micro-infinity Co. Ltd., Suwon, Korea
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 9 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
PDF [1053 KB, uploaded 13 October 2017]


We developed a MEMS inertial switch (hereafter, the switch) for an ignition system of missiles. The developed switch consists of four folded beams and a plate suspended by the beams, analogous to a well-known spring-mass system. The plate and four beams compose a single body, which is made from single crystalline silicon wafers by deep reactive ion etching techniques. This process gives high thermal stability and stress-free structure. The switching, either open or close a conductive path, is achieved by the movement of the plate suspended with four folded beams when the acceleration exceeds a predetermined threshold. With a spinning-rate table, the function of the switch was tested at various revolution speeds. The test results are compared with the calculation results by our analytical model.
Keywords: MEMS inertial switch; ignition system; mass-spring system MEMS inertial switch; ignition system; mass-spring system
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Lee, H.-N.; Jang, S.-G.; Lee, S.; Lee, J.-S.; Hwang, Y.-S. MEMS Inertial Switch for Military Applications. Proceedings 2017, 1, 343.

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