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Proceeding Paper

MEMS Inertial Switch for Military Applications †

1
Agency for Defence Development, Daejeon, Korea
2
Micro-infinity Co. Ltd., Suwon, Korea
*
Author to whom correspondence should be addressed.
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Proceedings 2017, 1(4), 343; https://doi.org/10.3390/proceedings1040343
Published: 9 August 2017
(This article belongs to the Proceedings of Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017)
We developed a MEMS inertial switch (hereafter, the switch) for an ignition system of missiles. The developed switch consists of four folded beams and a plate suspended by the beams, analogous to a well-known spring-mass system. The plate and four beams compose a single body, which is made from single crystalline silicon wafers by deep reactive ion etching techniques. This process gives high thermal stability and stress-free structure. The switching, either open or close a conductive path, is achieved by the movement of the plate suspended with four folded beams when the acceleration exceeds a predetermined threshold. With a spinning-rate table, the function of the switch was tested at various revolution speeds. The test results are compared with the calculation results by our analytical model.
Keywords: MEMS inertial switch; ignition system; mass-spring system MEMS inertial switch; ignition system; mass-spring system
MDPI and ACS Style

Lee, H.-N.; Jang, S.-G.; Lee, S.; Lee, J.-S.; Hwang, Y.-S. MEMS Inertial Switch for Military Applications. Proceedings 2017, 1, 343. https://doi.org/10.3390/proceedings1040343

AMA Style

Lee H-N, Jang S-G, Lee S, Lee J-S, Hwang Y-S. MEMS Inertial Switch for Military Applications. Proceedings. 2017; 1(4):343. https://doi.org/10.3390/proceedings1040343

Chicago/Turabian Style

Lee, Hyo-Nam, Seung-Gyo Jang, Sungryeol Lee, Jeong-Sun Lee, and Young-Suk Hwang. 2017. "MEMS Inertial Switch for Military Applications" Proceedings 1, no. 4: 343. https://doi.org/10.3390/proceedings1040343

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