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Journal: Photonics, 2024
Volume: 11
Number: 968
Article:
Picometer-Sensitivity Surface Profile Measurement Using Swept-Source Phase Microscopy
Authors:
by
Jinyun Yue, Jinze Cui, Zhaobo Zheng, Jianjun Liu, Yu Zhao, Shiwei Cui, Yao Yu, Yi Wang, Yuqian Zhao, Jingmin Luan, Jian Liu and Zhenhe Ma
Link:
https://www.mdpi.com/2304-6732/11/10/968
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