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Article

Optimal Selection of Backside Roughing Parameters of High-Value Components Using Abrasive Jet Processing

Department of Power Mechanical Engineering, National Formosa University, Yulin 632301, Taiwan
Academic Editors: A-Cheng Wang and Jung-Chou Hung
Processes 2021, 9(9), 1661; https://doi.org/10.3390/pr9091661
Received: 29 July 2021 / Revised: 24 August 2021 / Accepted: 9 September 2021 / Published: 14 September 2021
(This article belongs to the Special Issue New Frontiers in Magnetic Polishing and Electrochemical Technology)
This paper mainly presents a set of new Sapphire Backside Roughing technology. Presently, the associated Sapphire Backside Roughing technology is still concentrated on chemical etching, as its yield rate and efficiency are often limited by lattice structures, and the derived chemical waste fluid after etching is most likely to cause ecological contamination. In this research, refined abrasive jet processing technology is adopted, and in the meantime, the Taguchi experiment design method is taken for detailed experimental planning. Through processing parameter conditions and abrasive selection and development, proper surface roughing and processing uniformity are obtained so as to improve the various weak points of the abovementioned traditional etching effectively. It is discovered that abrasive blasting processing technology is, respectively, combined with wax-coated #1000 SiC particles and wax-coated #800 Zirconium particles to process the sapphire substrate with initial surface roughness 0.8–0.9 μmRa from the experiment. A 1.1–1.2 μmRa surface roughness effect can be achieved about two minutes later. The experimental results show that the actual degree of sapphire substrate surface roughing obtained in the AJM process depends on the gas pressure, impact angle, wax-coated abrasives, and additives. The new Sapphire Backside Roughing technology has high flexibility, which not only meets the requirements for sapphire surface roughing specification but can also effectively reduce the sapphire substrate roughing time and related cost. View Full-Text
Keywords: backside roughing technology; taguchi method; abrasive jet processing; surface roughness backside roughing technology; taguchi method; abrasive jet processing; surface roughness
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MDPI and ACS Style

Tsai, F.-C. Optimal Selection of Backside Roughing Parameters of High-Value Components Using Abrasive Jet Processing. Processes 2021, 9, 1661. https://doi.org/10.3390/pr9091661

AMA Style

Tsai F-C. Optimal Selection of Backside Roughing Parameters of High-Value Components Using Abrasive Jet Processing. Processes. 2021; 9(9):1661. https://doi.org/10.3390/pr9091661

Chicago/Turabian Style

Tsai, Feng-Che. 2021. "Optimal Selection of Backside Roughing Parameters of High-Value Components Using Abrasive Jet Processing" Processes 9, no. 9: 1661. https://doi.org/10.3390/pr9091661

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