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Processes 2019, 7(3), 133;

Computational Fluid Dynamics (CFD) Simulations and Experimental Measurements in an Inductively-Coupled Plasma Generator Operating at Atmospheric Pressure: Performance Analysis and Parametric Study

Electrical Engineering Department, V.J.T.I, Matunga, Mumbai 400019, India
Department of Physics, University of Mumbai, Kalina, Santacruz (E) 400098, India
Laser and Plasma Technology Division, BARC, Mumbai 400085, India
Department of Nuclear Science and Technology, Mody University of Science and Technology, Lakshamangarh (Sikar) 332311, Rajasthan, India
Department of Chemical Engineering, Institute of Chemical Technology, Matunga, Mumbai 400019, India
Department of Chemical Engineering, School of Engineering and Applied Sciences, Ahmedabad University, Ahmedabad 380009, India
Homi Bhabha National Institute, Anushaktinagar, Mumbai 400094, India
Authors to whom correspondence should be addressed.
Received: 27 November 2018 / Revised: 12 January 2019 / Accepted: 20 February 2019 / Published: 4 March 2019
(This article belongs to the Special Issue Multiphase Reaction Engineering, Reactors and Processes)
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In this article, electrical characteristics of a high-power inductively-coupled plasma (ICP) torch operating at 3 MHz are determined by direct measurement of radio-frequency (RF) current and voltage together with energy balance in the system. The variation of impedance with two parameters, namely the input power and the sheath gas flow rate for a 50 kW ICP is studied. The ICP torch system is operated at near atmospheric pressure with argon as plasma gas. It is observed that the plasma resistance increases with an increase in the RF-power. Further, the torch inductance decreases with an increase in the RF-power. In addition, plasma resistance and torch inductance decrease with an increase in the sheath gas flow rate. The oscillator efficiency of the ICP system ranges from 40% to 80% with the variation of the Direct current (DC) powers. ICP has also been numerically simulated using Computational Fluid Dynamics (CFD) to predict the impedance profile. A good agreement was found between the CFD predictions and the impedance experimental data published in the literature. View Full-Text
Keywords: inductively-coupled plasma; impedance; plasma; energy inductively-coupled plasma; impedance; plasma; energy

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Punjabi, S.B.; Barve, D.N.; Joshi, N.K.; Das, A.K.; Kothari, D.C.; Ganguli, A.A.; Sahasrabhude, S.N.; Joshi, J.B. Computational Fluid Dynamics (CFD) Simulations and Experimental Measurements in an Inductively-Coupled Plasma Generator Operating at Atmospheric Pressure: Performance Analysis and Parametric Study. Processes 2019, 7, 133.

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