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Journal: Processes, 2024
Volume: 12
Number: 1314
Article:
Production of High-Power Nitrogen Sputtering Plasma for TiN Film Preparation
Authors:
by
Taishin Sato, Sawato Igarashi, Katsuyuki Takahashi, Seiji Mukaigawa and Koichi Takaki
Link:
https://www.mdpi.com/2227-9717/12/7/1314
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