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Journal: Processes, 2024
Volume: 12
Number: 612

Article: Study of Mid-Pressure Ar Radiofrequency Plasma Used in Plasma-Enhanced Atomic Layer Deposition of α-Al2O3
Authors: by Carl-Thomas Piller, Jüri Raud, Lauri Aarik, Indrek Jõgi, Rasmus Talviste and Jaan Aarik
Link: https://www.mdpi.com/2227-9717/12/3/612

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