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Journal: Processes, 2022
Volume: 10
Number: 163
Article:
Nanoporous Layers and the Peculiarities of Their Local Formation on a Silicon Wafer
Authors:
by
Vitali Vasil’evich Starkov, Ekaterina Alexanrovna Gosteva, Dmitry Dmitry Zherebtsov, Maxim Vladimirovich Chichkov and Nikita Valerievich Alexandrov
Link:
https://www.mdpi.com/2227-9717/10/1/163
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