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Chemosensors 2016, 4(1), 4;

Chemical Vapour Deposition of Gas Sensitive Metal Oxides

SIX Research Centre, Brno University of Technology, Technická 10, Brno, CZ-61600, Czech Republic
Department of Chemistry, University College London, 20 Gordon Street, London, WC1H 0AJ, UK
Material Science and Nanotechnology Lab, Department of Physics, GC University Lahore, Pakistan
Author to whom correspondence should be addressed.
Academic Editor: Russell Binions
Received: 17 November 2015 / Revised: 26 January 2016 / Accepted: 5 February 2016 / Published: 1 March 2016
(This article belongs to the Special Issue Chemical Vapor Sensing)
Full-Text   |   PDF [1942 KB, uploaded 1 March 2016]   |  


This article presents a review of recent research efforts and developments for the fabrication of metal-oxide gas sensors using chemical vapour deposition (CVD), presenting its potential advantages as a materials synthesis technique for gas sensors along with a discussion of their sensing performance. Thin films typically have poorer gas sensing performance compared to traditional screen printed equivalents, attributed to reduced porosity, but the ability to integrate materials directly with the sensor platform provides important process benefits compared to competing synthetic techniques. We conclude that these advantages are likely to drive increased interest in the use of CVD for gas sensor materials over the next decade, whilst the ability to manipulate deposition conditions to alter microstructure can help mitigate the potentially reduced performance in thin films, hence the current prospects for use of CVD in this field look excellent. View Full-Text
Keywords: metal oxide; sensor; nano; chemical vapor deposition; CVD metal oxide; sensor; nano; chemical vapor deposition; CVD

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Vallejos, S.; Di Maggio, F.; Shujah, T.; Blackman, C. Chemical Vapour Deposition of Gas Sensitive Metal Oxides. Chemosensors 2016, 4, 4.

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