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Volume 12
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Article

Highly Sensitive and Selective MEMS Gas Sensor Based on WO3/Al2O3/Graphite for 2-Chloroethyl Ethyl Sulfide (2-CEES) Detection

by
Liangpan Yang
1,†,
Wangze Cheng
1,†,
Wenlong Yan
1,
Li Wen
2,*,
Changyue Xia
1,3,
Chuang Sun
1,3,
Doumeng Hu
1,*,
Yunong Zhao
1,
Xiaohui Guo
1,3,
Wei Zeng
1,3 and
Siliang Wang
1,3
1
Information Materials and Intelligent Sensing Laboratory of Anhui Province & Industry-Education-Research Institute of Advanced Materials and Technology for Integrated Circuits, Anhui University, Hefei 230601, China
2
Center for Nanoscale Characterization & Devices (CNCD), School of Physics and Wuhan National Laboratory for Optoelectronics (WNLO), Huazhong University of Science and Technology (HUST), Wuhan 430074, China
3
East China Institute of Photo-Electron ICs, Suzhou 215163, China
*
Authors to whom correspondence should be addressed.
†
These authors contributed equally to this work.
Chemosensors 2024, 12(1), 5; https://doi.org/10.3390/chemosensors12010005
Submission received: 5 November 2023 / Revised: 26 December 2023 / Accepted: 28 December 2023 / Published: 30 December 2023
(This article belongs to the Special Issue Nanomaterial-Based Chemosensors and Biosensors for Smart Sensing)
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Abstract

The detection and monitoring of toxic and harmful gases play a vital role in environmental protection, human health, and industrial and agricultural production. However, it is still challenging to develop gas sensors for the detection of toxic and harmful gases with high sensitivity, good recovery and excellent selectivity. In this study, WO3/Al2O3/graphite composite materials were used for an MEMS 2-CEES gas sensor (dichlorodiethyl sulfide simulation), and the corresponding sensing properties were explored. The experimental results show that when the working temperature is 340 °C, the response of the sensor to 2-CEES gas with a concentration of 5.70 ppm is 69%, the response time is 5 s and the recovery time is 42 s. The sensor also has the advantages of long-term stability and high selectivity. Furthermore, the MEMS gas sensor array based on WO3/Al2O3/graphite composite materials has been achieved and also exhibits excellent sensing performance. Overall, this study provides a strategy for realizing high-performance dichlorodiethyl sulfide gas sensors.
Keywords: MEMS; gas sensor; 2-CEES; long-term stability; high selectivity MEMS; gas sensor; 2-CEES; long-term stability; high selectivity

Share and Cite

MDPI and ACS Style

Yang, L.; Cheng, W.; Yan, W.; Wen, L.; Xia, C.; Sun, C.; Hu, D.; Zhao, Y.; Guo, X.; Zeng, W.; et al. Highly Sensitive and Selective MEMS Gas Sensor Based on WO3/Al2O3/Graphite for 2-Chloroethyl Ethyl Sulfide (2-CEES) Detection. Chemosensors 2024, 12, 5. https://doi.org/10.3390/chemosensors12010005

AMA Style

Yang L, Cheng W, Yan W, Wen L, Xia C, Sun C, Hu D, Zhao Y, Guo X, Zeng W, et al. Highly Sensitive and Selective MEMS Gas Sensor Based on WO3/Al2O3/Graphite for 2-Chloroethyl Ethyl Sulfide (2-CEES) Detection. Chemosensors. 2024; 12(1):5. https://doi.org/10.3390/chemosensors12010005

Chicago/Turabian Style

Yang, Liangpan, Wangze Cheng, Wenlong Yan, Li Wen, Changyue Xia, Chuang Sun, Doumeng Hu, Yunong Zhao, Xiaohui Guo, Wei Zeng, and et al. 2024. "Highly Sensitive and Selective MEMS Gas Sensor Based on WO3/Al2O3/Graphite for 2-Chloroethyl Ethyl Sulfide (2-CEES) Detection" Chemosensors 12, no. 1: 5. https://doi.org/10.3390/chemosensors12010005

APA Style

Yang, L., Cheng, W., Yan, W., Wen, L., Xia, C., Sun, C., Hu, D., Zhao, Y., Guo, X., Zeng, W., & Wang, S. (2024). Highly Sensitive and Selective MEMS Gas Sensor Based on WO3/Al2O3/Graphite for 2-Chloroethyl Ethyl Sulfide (2-CEES) Detection. Chemosensors, 12(1), 5. https://doi.org/10.3390/chemosensors12010005

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