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Journal: Chemosensors, 2023
Volume: 11
Number: 225
225
Article: Novel SAW Temperature Sensor with Pt/Ti/AlN/Mo/AlN/Si Structure for High Temperature Application
Authors: by Yong Ruan, Yang Chen, Yu Wu, Meng Shi, Yan Du, Zhiqiang Song, Yiyang Chen, Helei Dong, Congchun Zhang and Jiao Teng
Link: https://www.mdpi.com/2227-9040/11/4/225

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