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Journal: Technologies, 2023
Volume: 11
Number: 152

Article: Improvement of β-SiC Synthesis Technology on Silicon Substrate
Authors: by Yana Suchikova, Sergii Kovachov, Ihor Bohdanov, Artem L. Kozlovskiy, Maxim V. Zdorovets and Anatoli I. Popov
Link: https://www.mdpi.com/2227-7080/11/6/152

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