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Journal: Coatings, 2019
Volume: 9
Number: 53

Article: Structure, Mechanical and Optical Properties of Silicon-Rich Al–Si–N Films Prepared by High Power Impulse Magnetron Sputtering
Authors: by Sergei Zenkin, Fedor Konusov, Aleksandr Lauk, Denis Zelentsov and Stanislav Demchenko
Link: https://www.mdpi.com/2079-6412/9/1/53

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