Order Article Reprints
Journal: Coatings, 2025
Volume: 15
Number: 708
Article:
Optimizing the PECVD Process for Stress-Controlled Silicon Nitride Films: Enhancement of Tensile Stress via UV Curing and Layered Deposition
Authors:
by
Jianping Ning, Chunjie Niu, Zhen Tang, Yue Sun, Hao Yan and Dayu Zhou
Link:
https://www.mdpi.com/2079-6412/15/6/708
MDPI offers high quality article reprints with convenient shipping to destinations worldwide. Each reprint features a 270 gsm bright white cover
and 105 gsm premium white paper, bound with two stitches for durability and printed in full color. The cover design is customized to your article
and designed to be complimentary to the journal.