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Journal: Coatings, 2023
Volume: 13
Number: 1452
Article:
Controlling Bowing and Narrowing in SiO2 Contact-Hole Etch Profiles Using Heptafluoropropyl Methyl Ether as an Etchant with Low Global Warming Potential
Authors:
by
Sanghyun You, Hyun Seok Yang, Dongjun Jeon, Heeyeop Chae and Chang-Koo Kim
Link:
https://www.mdpi.com/2079-6412/13/8/1452
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