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Journal: Coatings, 2022
Volume: 12
Number: 1064

Article: Spectroscopic Analysis of CF4/O2 Plasma Mixed with N2 for Si3N4 Dry Etching
Authors: by Wan Soo Song, Ju Eun Kang and Sang Jeen Hong
Link: https://www.mdpi.com/2079-6412/12/8/1064

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