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Journal: Coatings, 2022
Volume: 12
Number: 329

Article: Epitaxial Growth of SiC Films on 4H-SiC Substrate by High-Frequency Induction-Heated Halide Chemical Vapor Deposition
Authors: by Rong Tu, Chengyin Liu, Qingfang Xu, Kai Liu, Qizhong Li, Xian Zhang, Marina L. Kosinova, Takashi Goto and Song Zhang
Link: https://www.mdpi.com/2079-6412/12/3/329

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