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Journal: Coatings, 2022
Volume: 12
Number: 329
Article:
Epitaxial Growth of SiC Films on 4H-SiC Substrate by High-Frequency Induction-Heated Halide Chemical Vapor Deposition
Authors:
by
Rong Tu, Chengyin Liu, Qingfang Xu, Kai Liu, Qizhong Li, Xian Zhang, Marina L. Kosinova, Takashi Goto and Song Zhang
Link:
https://www.mdpi.com/2079-6412/12/3/329
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