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Journal: Coatings, 2020
Volume: 10
Number: 712
712
Article: Adsorption of Titanium Halides on Nitride and Oxide Surfaces during Atomic Layer Deposition: A DFT Study
Authors: by Jeongwoo Park, Neung Kyung Yu, Donghak Jang, Eunae Jung, Hyunsik Noh, Jiwon Moon, Deoksin Kil and Bonggeun Shong
Link: https://www.mdpi.com/2079-6412/10/8/712

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