Preparation and Characterization of Perforated SERS Active Array for Particle Trapping and Sensitive Molecular Analysis
by
István Rigó 1,*
, Miklós Veres 1, Tamás Váczi 1, Eszter Holczer 2, Orsolya Hakkel 2, András Deák 2 and Péter Fürjes 2
István Rigó 1,*, Miklós Veres 1, Tamás Váczi 1, Eszter Holczer 2, Orsolya Hakkel 2, András Deák 2 and Péter Fürjes 2
1
Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Konkoly-Thege Miklós út 29–33., HAS, 1121 Budapest, Hungary
2
Institute of Technical Physics and Materials Science, Centre for Energy Research, Konkoly-Thege Miklós út 29–33., HAS, 1121 Budapest, Hungary
*
Author to whom correspondence should be addressed.
Biosensors 2019, 9(3), 93; https://doi.org/10.3390/bios9030093
Received: 31 May 2019 / Revised: 26 June 2019 / Accepted: 17 July 2019 / Published: 25 July 2019
A gold-coated array of flow-through inverse pyramids applicable as substrate for entrapment and immobilization of micro-objects and for surface enhanced Raman spectroscopic measurements was fabricated using bulk micromachining techniques from silicon. Surface morphology, optical reflectance, immobilization properties, and surface enhanced Raman amplification of the array were modelled and characterized. It was found that the special perforated periodic 3D structure can be used for parallel particle and cell trapping and highly sensitive molecular analysis of the immobilized objects.
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Keywords:
surface enhanced Raman spectroscopy; SERS array; bulk micromachining; particle/cell entrapment; FDTD
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MDPI and ACS Style
Rigó, I.; Veres, M.; Váczi, T.; Holczer, E.; Hakkel, O.; Deák, A.; Fürjes, P. Preparation and Characterization of Perforated SERS Active Array for Particle Trapping and Sensitive Molecular Analysis. Biosensors 2019, 9, 93.
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