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Correction: Schavkan, A., et al. Number Concentration of Gold Nanoparticles in Suspension: SAXS and spICPMS as Traceable Methods Compared to Laboratory Methods. Nanomaterials 2019, 9, 502
Article

Enhanced Phase Transition Properties of VO2 Thin Films on 6H-SiC (0001) Substrate Prepared by Pulsed Laser Deposition

School of Physics and Electronic Information, Huaibei Normal University, Huaibei 235000, China
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Nanomaterials 2019, 9(8), 1061; https://doi.org/10.3390/nano9081061
Received: 3 July 2019 / Revised: 13 July 2019 / Accepted: 21 July 2019 / Published: 24 July 2019
For growing high quality epitaxial VO2 thin films, the substrate with suitable lattice parameters is very important if considering the lattice matching. In addition, the thermal conductivity between the substrate and epitaxial film should be also considered. Interestingly, the c-plane of hexagonal 6H-SiC with high thermal conductivity has a similar lattice structure to the VO2 (010), which enables epitaxial growth of high quality VO2 films on 6H-SiC substrates. In the current study, we deposited VO2 thin films directly on 6H-SiC (0001) single-crystal substrates by pulsed laser deposition (PLD) and systematically investigated the crystal structures and surface morphologies of the films as the function of growth temperature and film thickness. With optimized conditions, the obtained epitaxial VO2 film showed pure monoclinic phase structure and excellent phase transition properties. Across the phase transition from monoclinic structure (M1) to tetragonal rutile structure (R), the VO2/6H-SiC (0001) film demonstrated a sharp resistance change up to five orders of magnitude and a narrow hysteresis width of only 3.3 °C. View Full-Text
Keywords: VO2; 6H-SiC; pulsed laser deposition (PLD) VO2; 6H-SiC; pulsed laser deposition (PLD)
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MDPI and ACS Style

Cheng, X.; Gao, Q.; Li, K.; Liu, Z.; Liu, Q.; Liu, Q.; Zhang, Y.; Li, B. Enhanced Phase Transition Properties of VO2 Thin Films on 6H-SiC (0001) Substrate Prepared by Pulsed Laser Deposition. Nanomaterials 2019, 9, 1061. https://doi.org/10.3390/nano9081061

AMA Style

Cheng X, Gao Q, Li K, Liu Z, Liu Q, Liu Q, Zhang Y, Li B. Enhanced Phase Transition Properties of VO2 Thin Films on 6H-SiC (0001) Substrate Prepared by Pulsed Laser Deposition. Nanomaterials. 2019; 9(8):1061. https://doi.org/10.3390/nano9081061

Chicago/Turabian Style

Cheng, Xiankun; Gao, Qiang; Li, Kaifeng; Liu, Zhongliang; Liu, Qinzhuang; Liu, Qiangchun; Zhang, Yongxing; Li, Bing. 2019. "Enhanced Phase Transition Properties of VO2 Thin Films on 6H-SiC (0001) Substrate Prepared by Pulsed Laser Deposition" Nanomaterials 9, no. 8: 1061. https://doi.org/10.3390/nano9081061

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