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Nanomaterials 2017, 7(12), 419;

Properties-Adjustable Alumina-Zirconia Nanolaminate Dielectric Fabricated by Spin-Coating

School of Electronic and Information Engineering, South China University of Technology, Guangzhou 510640, China
Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China
Key Laboratory of Advanced Display and System Applications of Ministry of Education, Shanghai University, Shanghai 200072, China
Institute for Advanced Materials and Guangdong Provincial Key Laboratory of Quantum Engineering and Quantum Materials, South China Normal University, Guangzhou 510006, China
Authors to whom correspondence should be addressed.
Received: 15 October 2017 / Revised: 26 November 2017 / Accepted: 27 November 2017 / Published: 29 November 2017
(This article belongs to the Special Issue Mechanics, Electrical and Optical Properties of Nano-Thin Films)
PDF [10745 KB, uploaded 29 November 2017]


In this paper, an alumina-zirconia (Al2O3-ZrO2) nanolaminate dielectric was fabricated by spin-coating and the performance was investigated. It was found that the properties of the dielectric can be adjusted by changing the content of Al2O3/ZrO2 in nanolaminates: when the content of Al2O3 was higher than 50%, the properties of nanolaminates, such as the optical energy gap, dielectric strength (Vds), capacitance density, and relative permittivity were relatively stable, while the change of these properties became larger when the content of Al2O3 was less than 50%. With the content of ZrO2 varying from 50% to 100%, the variation of these properties was up to 0.482 eV, 2.12 MV/cm, 135.35 nF/cm2, and 11.64, respectively. Furthermore, it was demonstrated that the dielectric strength of nanolaminates were influenced significantly by the number (n) of bilayers. Every increment of one Al2O3-ZrO2 bilayer will enhance the dielectric strength by around 0.39 MV/cm (Vds ≈ 0.86 + 0.39n). This could be contributed to the amorphous alumina which interrupted the grain boundaries of zirconia. View Full-Text
Keywords: properties-adjustable; Al2O3-ZrO2 nanolaminate dielectric; spin-coating properties-adjustable; Al2O3-ZrO2 nanolaminate dielectric; spin-coating

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Peng, J.; Wei, J.; Zhu, Z.; Ning, H.; Cai, W.; Lu, K.; Yao, R.; Tao, H.; Zheng, Y.; Lu, X. Properties-Adjustable Alumina-Zirconia Nanolaminate Dielectric Fabricated by Spin-Coating. Nanomaterials 2017, 7, 419.

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