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Mechanical, Corrosion and Biological Properties of Room-Temperature Sputtered Aluminum Nitride Films with Dissimilar Nanostructure

1
National Institute of Materials Physics, RO-077125 Magurele, Romania
2
Army Centre for Medical Research, RO-010195 Bucharest, Romania
3
Institute of Materials Science and Engineering, Lodz University of Technology, 90-924 Lodz, Poland
4
National Institute for Lasers, Plasma and Radiation Physics, RO-077125 Magurele, Romania
5
Petroleum-Gas University of Ploiesti, RO-100680 Ploiesti, Romania
6
National Institute for Optoelectronics, RO-077125 Magurele, Romania
*
Author to whom correspondence should be addressed.
Nanomaterials 2017, 7(11), 394; https://doi.org/10.3390/nano7110394
Received: 7 September 2017 / Revised: 13 November 2017 / Accepted: 14 November 2017 / Published: 17 November 2017
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Abstract

Aluminum Nitride (AlN) has been long time being regarded as highly interesting material for developing sensing applications (including biosensors and implantable sensors). AlN, due to its appealing electronic properties, is envisaged lately to serve as a multi-functional biosensing platform. Although generally exploited for its intrinsic piezoelectricity, its surface morphology and mechanical performance (elastic modulus, hardness, wear, scratch and tensile resistance to delamination, adherence to the substrate), corrosion resistance and cytocompatibility are also essential features for high performance sustainable biosensor devices. However, information about AlN suitability for such applications is rather scarce or at best scattered and incomplete. Here, we aim to deliver a comprehensive evaluation of the morpho-structural, compositional, mechanical, electrochemical and biological properties of reactive radio-frequency magnetron sputtered AlN nanostructured thin films with various degrees of c-axis texturing, deposited at a low temperature (~50 °C) on Si (100) substrates. The inter-conditionality elicited between the base pressure level attained in the reactor chamber and crystalline quality of AlN films is highlighted. The potential suitability of nanostructured AlN (in form of thin films) for the realization of various type of sensors (with emphasis on bio-sensors) is thoroughly probed, thus unveiling its advantages and limitations, as well as suggesting paths to safely exploit the remarkable prospects of this type of materials. View Full-Text
Keywords: aluminum nitride; magnetron sputtering; structure; nano-mechanical tests; corrosion; biocompatibility aluminum nitride; magnetron sputtering; structure; nano-mechanical tests; corrosion; biocompatibility
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Besleaga, C.; Dumitru, V.; Trinca, L.M.; Popa, A.-C.; Negrila, C.-C.; Kołodziejczyk, Ł.; Luculescu, C.-R.; Ionescu, G.-C.; Ripeanu, R.-G.; Vladescu, A.; Stan, G.E. Mechanical, Corrosion and Biological Properties of Room-Temperature Sputtered Aluminum Nitride Films with Dissimilar Nanostructure. Nanomaterials 2017, 7, 394.

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