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Journal: Nanomaterials, 2024
Volume: 14
Number: 945

Article: Formation of Black Silicon in a Process of Plasma Etching with Passivation in a SF6/O2 Gas Mixture
Authors: by Andrey Miakonkikh and Vitaly Kuzmenko
Link: https://www.mdpi.com/2079-4991/14/11/945

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