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Journal: Nanomaterials, 2022
Volume: 12
Number: 512

Article: Room Temperature Deposition of Nanocrystalline SiC Thin Films by DCMS/HiPIMS Co-Sputtering Technique
Authors: by Vasile Tiron, Elena-Laura Ursu, Daniel Cristea, Georgiana Bulai, George Stoian, Teodora Matei and Ioana-Laura Velicu
Link: https://www.mdpi.com/2079-4991/12/3/512

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