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Journal: NanomaterialsVolume: 12Number: 512
Article: Room Temperature Deposition of Nanocrystalline SiC Thin Films by DCMS/HiPIMS Co-Sputtering Technique
  • Authors:
  • Vasile Tiron1,
  • Elena-Laura Ursu2 and
  • Daniel Cristea3,*
  • et al.
Link: https://www.mdpi.com/2079-4991/12/3/512

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