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Journal: Nanomaterials, 2022
Volume: 12
Number: 2814
2814
Article: Enhanced Electrical Properties of Copper Nitride Films Deposited via High Power Impulse Magnetron Sputtering
Authors: by Yin-Hung Chen, Pei-Ing Lee, Shikha Sakalley, Chao-Kuang Wen, Wei-Chun Cheng, Hui Sun and Sheng-Chi Chen
Link: https://www.mdpi.com/2079-4991/12/16/2814

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