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Appl. Sci. 2018, 8(7), 1047;

Fabrication and Testing of Thermoelectric CMOS-MEMS Microgenerators with CNCs Film

Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan
Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, Tamsui 251, Taiwan
Department of Electro-Optical Engineering, Yuan Ze University, Taoyuan 320, Taiwan
Author to whom correspondence should be addressed.
Received: 27 May 2018 / Revised: 20 June 2018 / Accepted: 25 June 2018 / Published: 27 June 2018
(This article belongs to the Special Issue Selected Papers from the 2017 International Conference on Inventions)
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Manufacturing and testing of a TMG (thermoelectric microgenerator) with CNCs (carbon nanocapsules) film fabricated utilizing a CMOS (complementary metal oxide semiconductor) technology are investigated. The microgenerator includes a CNCs layer, thermopiles, and thermometers. CNCs, a heat absorbing material, are coated on the microgenerator, so that the TD (temperature difference) of HP (hot part) and CP (cold part) in the thermopiles increases, resulting in an enhancement of the microgenerator OP (output power). Thermometers fabricated in the microgenerator are employed to detect the HP and CP temperature in thermopiles. In order to enhance thermopiles’ TD, the HP in thermopiles was manufactured as suspension structures isolating heat dissipation, and the CP in thermopiles was made on a silicon substrate to increase the heat sink. Experiments showed that the microgenerator OV (output voltage) was 3.3 mV and its output power was 125 pW at TD 3 K. Voltage and power factors of TMG were 0.71 mV/K/mm2 and 9.04 pW/K2/mm2, respectively. View Full-Text
Keywords: thermoelectric; microgenerator; CMOS-MEMS; carbon nanocapsules thermoelectric; microgenerator; CMOS-MEMS; carbon nanocapsules

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Chen, Y.-W.; Wu, C.-C.; Hsu, C.-C.; Dai, C.-L. Fabrication and Testing of Thermoelectric CMOS-MEMS Microgenerators with CNCs Film. Appl. Sci. 2018, 8, 1047.

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