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Journal: Appl. Sci., 2024
Volume: 14
Number: 8166

Article: Piezoelectrically and Capacitively Transduced Hybrid MEMS Resonator with Superior RF Performance and Enhanced Parasitic Mitigation by Low-Temperature Batch Fabrication
Authors: by Adnan Zaman, Ugur Guneroglu, Abdulrahman Alsolami and Jing Wang
Link: https://www.mdpi.com/2076-3417/14/18/8166

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