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Journal: Applied SciencesVolume: 12Number: 4339
Article: Simulation and Experimental Investigation of the Radial Groove Effect on Slurry Flow in Oxide Chemical Mechanical Polishing
  • Authors:
  • Yeongkwang Cho1,†,
  • Pengzhan Liu1,† and
  • Sanghuck Jeon1
  • et al.
Link: https://www.mdpi.com/2076-3417/12/9/4339

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