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Journal: Appl. Sci., 2022
Volume: 12
Number: 4339
4339
Article: Simulation and Experimental Investigation of the Radial Groove Effect on Slurry Flow in Oxide Chemical Mechanical Polishing
Authors: by Yeongkwang Cho, Pengzhan Liu, Sanghuck Jeon, Jungryul Lee, Sunghoon Bae, Seokjun Hong, Young Hwan Kim and Taesung Kim
Link: https://www.mdpi.com/2076-3417/12/9/4339

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