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Journal: Appl. Sci., 2022
Volume: 12
Number: 8396

Article: MEMS High Aspect Ratio Trench Three-Dimensional Measurement Using Through-Focus Scanning Optical Microscopy and Deep Learning Method
Authors: by Guannan Li, Junkai Shi, Chao Gao, Xingjian Jiang, Shuchun Huo, Chengjun Cui, Xiaomei Chen and Weihu Zhou
Link: https://www.mdpi.com/2076-3417/12/17/8396

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