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Journal: Polymers, 2020
Volume: 12
Number: 2971
Article:
Dielectric Response Spectroscopy as Means to Investigate Interfacial Effects for Ultra-Thin Film Polymer-Based High NA EUV Lithography
Authors:
by
Joren Severi, Danilo De Simone and Stefan De Gendt
Link:
https://www.mdpi.com/2073-4360/12/12/2971
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