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Simulation-Based Development of a New Cylindrical-Cavity Microwave-Plasma Reactor for Diamond-Film Synthesis

1,2,†, 1,2,†, 1,2,*, 3,*, 3 and 1,2
1
The Laboratory of Transients in Hydraulic Machinery, School of Power and Mechanical Engineering, Wuhan University, Wuhan 430072, China
2
Electronic Manufacturing and Packaging Laboratory, The Institute of Technological Sciences, Wuhan University, Wuhan 430072, China
3
School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
*
Authors to whom correspondence should be addressed.
The first two authors contributed equally to this paper.
Crystals 2019, 9(6), 320; https://doi.org/10.3390/cryst9060320
Received: 17 May 2019 / Revised: 16 June 2019 / Accepted: 20 June 2019 / Published: 24 June 2019
(This article belongs to the Special Issue Synthesis and Characterization of Diamond Crystals)
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Abstract

A 2.45 GHz microwave-plasma chemical-vapor deposition (MPCVD) reactor was designed and built in-house by collaborating with Guangdong TrueOne Semiconductor Technology Co., Ltd. A cylindrical cavity was designed as the deposition chamber and a circumferential coaxial-mode transformer located at the top of the cavity was adopted as the antenna. Two quartz-ring windows that were placed far away from the plasma and cooled by water-cooling cavity walls were used to affix the antenna to the cavity and act as a vacuum seal for the reactor, respectively. This design improved the sealing and protected the quartz windows. In addition, a numerical simulation was proposed to predict the electric-field and plasma-density distributions in the cavity. Based on the simulation results, a microwave-plasma reactor with TM021 mode was built. The leak rate of this new reactor was tested to be as low as 1 × 10−8 Pa·m3·s−1, and the maximal microwave power was as high as 10 kW. Then, single-crystal diamond films were grown with the morphology and crystalline quality characterized by an optical microscope, atomic force microscope (AFM), Raman spectrometer, photoluminescence (PL) spectrometer, and high-resolution X-ray diffractometer. It was shown that the newly developed MPCVD reactor can produce diamond films with high quality and purity. View Full-Text
Keywords: microwave-plasma chemical-vapor deposition (MPCVD); cylindrical cavity; diamond films microwave-plasma chemical-vapor deposition (MPCVD); cylindrical cavity; diamond films
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Wang, Q.; Wu, G.; Liu, S.; Gan, Z.; Yang, B.; Pan, J. Simulation-Based Development of a New Cylindrical-Cavity Microwave-Plasma Reactor for Diamond-Film Synthesis. Crystals 2019, 9, 320.

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