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Journal: Crystals, 2025
Volume: 15
Number: 902

Article: Research on Ultrasonic-Assistance Microarc Plasma Polishing Method for 4H-SiC
Authors: by Feilong Liu, Jiayi Yue, Jianhua Shi, Shujuan Li, Yanfei Zhang and Zhenchao Yang
Link: https://www.mdpi.com/2073-4352/15/10/902

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