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Journal: Crystals, 2022
Volume: 12
Number: 101

Article: A Review on Precision Polishing Technology of Single-Crystal SiC
Authors: by Gaoling Ma, Shujuan Li, Feilong Liu, Chen Zhang, Zhen Jia and Xincheng Yin
Link: https://www.mdpi.com/2073-4352/12/1/101

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