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Open AccessArticle

Optimization of Ultra-Thin Pulsed-DC Magnetron Sputtered Aluminum Films for the Technology of Hyperbolic Metamaterials

1
Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warsaw, Poland
2
Institute of Physics, Polish Academy of Sciences, Al. Lotników 32/46, 02-668 Warsaw, Poland
3
Faculty of Physics, Warsaw University of Technology, Koszykowa 75, 00-662 Warsaw, Poland
*
Author to whom correspondence should be addressed.
Crystals 2020, 10(5), 384; https://doi.org/10.3390/cryst10050384
Received: 8 April 2020 / Revised: 5 May 2020 / Accepted: 7 May 2020 / Published: 8 May 2020
(This article belongs to the Special Issue Metamaterials)
The future applications of hyperbolic metamaterials demand stacks of materials with alternative ultra-thin conductive/dielectric films with good homogeneity of the thickness and reduced roughness level. In this work, the technology of pulsed-DC magnetron sputtering of aluminum was optimized using the Taguchi method in order to fabricate Al films with improved roughness level. The performed structural characterization proved the smaller Al domains and better homogeneity of the surface. The optimized process was used to fabricate a multilayer structure of Al/HfOx as the metamaterial media. The fabricated structures were optically characterized in the UV/VIS range. The presented findings demonstrated the tunability effect of the effective reflectance of the examined stacks. The presented results are promising for the future application of multilayer structures in novel photonic devices based on hyperbolic metamaterials. View Full-Text
Keywords: aluminum (Al); Magnetron Sputtering; Taguchi orthogonal tables; Scanning Electron Microscopy (SEM); Atomic Force Microscopy (AFM) aluminum (Al); Magnetron Sputtering; Taguchi orthogonal tables; Scanning Electron Microscopy (SEM); Atomic Force Microscopy (AFM)
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Mroczyński, R.; Iwanicki, D.; Fetliński, B.; Ożga, M.; Świniarski, M.; Gertych, A.; Zdrojek, M.; Godlewski, M. Optimization of Ultra-Thin Pulsed-DC Magnetron Sputtered Aluminum Films for the Technology of Hyperbolic Metamaterials. Crystals 2020, 10, 384.

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