Search Results (2,111)

This study systematically investigated the effects of oxygen plasma treatment on oxygen vacancy defects in sputtered β-gallium oxide (β-Ga₂O₃) films and their corresponding ultraviolet (UV) detection performance. The sputtered β-Ga₂O₃ film subjected to 1 min of oxygen plasma treatment exhibited optimal photodetection properties. Compared to the untreated sample, the dark current was reduced by approximately one order of magnitude to 0.378 pA at 10 V bias. It exhibited an 86% (from 2.92 s to 0.41 s) decrease in response time, a 41.6% increase in photocurrent, a very high photo-to-dark current ratio of 9.18 × 10⁵, and a specific detectivity of 2.62 × 10¹⁰ cm·Hz^1/2W⁻¹ under 254 nm UV illumination intensity of 799 μW/cm² at 10 V bias. Notably, appropriate oxygen plasma treatment minimizes electron capture, enhances the separation and collection of photogenerated carriers, and suppresses the persistent photoconductivity (PPC) effect, thus ultimately shortening the response time. Oxygen plasma processing thus provides an effective approach to fabricating high-performance β-Ga₂O₃ solar-blind photodetectors (SBPDs). Full article

A chromium/amorphous carbon (Cr/(Cr/a-C)ml) nanostructured multilayer coating with a chromium sublayer was deposited on 42CrMo4 (1.7225,BDS EN ISO 683-2:2018), 100Cr6 (1.3505, BDS EN ISO 683-17:2024), and HS18-0-1 (1.3355, BDS EN ISO 4957:2018) alloy steels, selected for their use in contact-loaded components subjected to cyclic fatigue and intense wear. The coating was sputter deposited by MF pulsed magnetron sputtering under consistent process parameters. The resulting coating, approximately 1.8 μm thick, can significantly enhance the service life of these components. Adhesion was evaluated via the Daimler–Benz test, while coating homogeneity was confirmed through energy-dispersive spectroscopy, revealing a consistent chemical composition across sample surfaces. Raman spectroscopy indicated a high sp³/sp² ratio, confirming a dominant diamond-like carbon structure. Nanoindentation measurements verified the coating’s hardness, aligning with the observed structural properties. These results validate the process parameters for depositing a Cr/(Cr/a-C)ml coating on these alloy steels, achieving this study’s objectives. Full article

A numerical method to estimate the plasma characteristics with the variation in control parameters is suggested with an artificial intelligence model using limited finite datasets. A transformer-based regression method was applied to estimate the spatial profiles of plasma characteristics in a DC magnetron sputtering system from limited data obtained by a two-dimensional particle-in-cell simulation under varying pressure. Based on the obtained simulation data, an artificial intelligence method successfully predicts the energy and angular distribution of ions incident on the target. This approach enables the quantitative estimation of the impact of various system parameter changes on plasma characteristics using only a limited number of simulation results. It is beneficial for practical applications, such as process optimization, because the ion energy and angle distributions can be estimated very fast without simulating all the cases. Full article

Hard Cr-Al-Si-B-(N) coatings were deposited in Ar and Ar–15%N₂ medium by d.c. magnetron sputtering of composite targets manufactured using self-propagating high-temperature synthesis. The structure of the coatings was studied by X-ray diffraction, scanning and transmission electron microscopy, energy dispersion spectroscopy, and glow discharge optical emission spectroscopy. The coating properties were determined by nanoindentation, scratch testing, and tribological pin-on-disc testing at room and elevated temperatures. The oxidation resistance and diffusion barrier properties of the coatings were also evaluated. The results obtained showed that non-reactive coatings had a coarse crystalline structure and contained Cr₅Si₃, CrB_x, and Cr₂Al phases. The introduction of nitrogen into the coating composition promoted crystallite refinement and structural amorphization. Non-reactive CrAl₄Si₁₁B₂₁ coatings had a maximum hardness up to 29 GPa and an elastic modulus up to 365 GPa. The introduction of nitrogen into the coating composition resulted in a 16–32% reduction in mechanical properties. The CrAl₆Si₁₂B₅N₂₅ coating, which exhibited maximal plasticity index H/E = 0.100 and resistance to plastic deformation H³/E² = 0.247 GPa, was characterized by a minimum wear rate Vw = 5.7 × 10⁻⁶ mm³N⁻¹m⁻¹ and a friction coefficient of 0.47. While the CrAl₁₈Si₁₁B₅N₂₆ coating demonstrated a record level of oxidation resistance and successfully resisted oxidation up to a temperature of 1300 °C. Full article

Gold thin films were deposited on quartz substrates by DC magnetron sputtering to fabricate electrodes for electrochemical and resistive sensing applications. The influence of sputtering parameters on film thickness, structure, and electrical properties was systematically investigated. XRD analysis revealed a predominant (111) crystallographic orientation. Microstrain values, determined via Williamson–Hall (W–H) analysis, were low (below 0.013) and closely correlated with surface roughness trends. AFM measurements showed that the surface roughness increased with film thickness. Electrical resistivity decreased linearly with increasing thickness and exhibited a critical grain size of approximately 25 nm, beyond which conductivity improved markedly. These results demonstrate the strong dependence of Au thin-film morphology and performance on deposition conditions, offering practical guidelines for optimizing their application in functional sensing devices. Full article

MoSe₂ is considered one of the most promising low-friction coatings for tribological applications due to its exceptionally low sensitivity to air humidity. However, knowledge of its tribological performance, especially in combination with oil lubrication, is still very limited. In this study, the tribological properties of MoSe₂ coatings deposited by magnetron sputtering were investigated using a reciprocating pin-on-flat tribometer against steel balls under both dry and PAO4-lubricated sliding conditions. The worn surfaces of the coatings and their counterparts were analyzed by profilometry, Raman spectroscopy, and scanning and transmission electron microscopy. Under dry lubrication, the coatings exhibited low friction (0.054), which was attributed to the combined effects of a lubricious transfer layer forming on the steel ball and a crystalline MoSe₂ tribolayer in the coating wear track, with MoSe₂ basal planes aligned parallel to the sliding direction. In contrast, under oil lubrication, the absence of a transfer layer on the ball and a crystalline tribolayer in the coating wear track resulted in higher friction (0.101). This high friction was accompanied by a 27% reduction in the wear rate due to the presence of PAO4 at the sliding contact, which served as a sealant and protected the coating from oxidation. Full article

Low-emissivity (low-e) coatings are used in architectural and automotive glazing for energy-saving applications. These are used to minimise heat transmission through the windows by reflection. Low-e coatings are semi-transparent coatings that typically comprise a metallic layer that reflects infrared light, sandwiched between two dielectric layers that protect the metal and enhance its visible transmittance. Ag is usually used as the metallic layer because of its colour neutrality and low optical absorption in the visible range. However, Ag-based low-e coatings easily degrade upon atmosphere exposure; therefore, they need to be placed inside the cavities of multiple-pane windows. In this paper, Au was used as an alternative to Ag and was sandwiched between WO₃, SnO₂ and Nb₂O₅ dielectric layers. The thickness of each layer was optimised to achieve the highest visible transmittance and infrared reflectance. The durability of the coatings was assessed by means of corrosion and abrasion resistance tests. We demonstrate that the Nb₂O₅/Au/Nb₂O₅ coating system provides a visible light transmittance of 56%, an emissivity as low as 0.04 and outstanding corrosion resistance (1000 h of salt spray testing), indicating its excellent potential to be used as first surface low-e coating. Full article

NiO-based hole-transport layers are crucial for high-efficiency perovskite solar cells. An industrial deposition method of NiO films is magnetron sputtering using ceramic targets. NiO targets doped with Li contents at 1%, 3%, and 5% were designed, and the doping contents and sintering temperatures were investigated. All the targets have a face-centered cubic phase, dense microstructure, and an average size of a few microns. The NLO targets sintered at an optimal temperature of 1400 °C exhibited high relative density (>98%) and low resistivity (<6 Ω∙cm). These results pave the way for depositing NiO-based hole-transport layer by magnetron sputtering. Full article

This study provides a comprehensive investigation into the growth behavior of boron nitride (BN) buffer layers on Silicon carbide (SiC) substrates and their influence on interfacial band alignment. BN layers were deposited on semi-insulating SiC by RF magnetron sputtering with deposition times of 2.5, 5, and 7.5 min (these deposition times are specific experimental parameters to adjust the thickness of the amorphous BN layer, not intrinsic material properties of BN). Atomic force microscopy revealed that the surface roughness of the BN layers initially decreased and then increased with thickness, indicating an evolution from nucleation to continuous film formation, followed by surface coarsening. Transmission electron microscopy confirmed the BN thicknesses of approximately 3.25, 4.91, and 7.57 nm, showing that the layers gradually became uniform and compact, thereby improving the structural integrity of the BN/SiC interface. Band alignment was analyzed using the Kraut method, yielding a valence band offset of ~0.36 eV and a conduction band offset of ~2.34 eV for the BN/SiC heterojunction. This alignment indicates that the BN buffer layer introduces a pronounced electron barrier, effectively suppressing leakage, while the relatively small VBO facilitates hole transport across the interface. These findings demonstrate that the BN buffer layer enhances interfacial bonding, reduces defect states, and enables band structure engineering, offering a promising strategy for improving the performance of wide-bandgap semiconductor devices. Full article

Copper nitride (Cu₃N) is gaining attention as an eco-friendly thin-film semiconductor in a myriad of applications, including storage devices, microelectronic components, photodetectors, and photovoltaic cells. This work presents a detailed optoelectronic study of Cu₃N thin films grown by reactive RF-magnetron sputtering under pure N₂. An overview of the state-of-the-art literature on this material and its potential applications is also provided. The studied films consist of Cu₃N polycrystals with a cubic anti-ReO₃ type structure exhibiting a preferential (100) orientation. Their optical properties across the UV-Vis-NIR spectral range were investigated using a combination of multi-angle spectroscopic ellipsometry, broadband transmission, and reflection measurements. Our model employs a stratified geometrical approach, primarily to capture the depth-dependent compositional variations of the Cu₃N film while also accounting for surface roughness and the underlying glass substrate. The complex dielectric function of the film material is precisely determined through an advanced dispersion model that combines multiple oscillators. By integrating the Tauc–Lorentz, Gaussian, and Drude models, this approach captures the distinct electronic transitions of this polycrystal. This customized optical model allowed us to accurate extract both the indirect (1.83–1.85 eV) and direct (2.38–2.39 eV) bandgaps. Our multifaceted characterization provides one of the most extensive studies of Cu₃N thin films to date, paving the way for optimized device applications and broader utilization of this promising binary semiconductor, and showing its particular potential for photovoltaic given its adequate bandgap energies for solar applications. Full article

Magnetron sputtering offers a scalable route to magnetic topological insulators (MTIs) based on Cr-doped Sb₂Te₃. We combine a range of X-ray diffraction (XRD), reciprocal-space mapping (RSM), scanning transmission electron microscopy (STEM), scanning TEM-energy-dispersive X-ray spectroscopy (STEM-EDS), and X-ray absorption spectroscopy, and X-ray magnetic circular dichroism (XAS/XMCD) techniques to study the structure and magnetism of Cr-doped Sb₂Te₃ films. Symmetric $\theta$-2$\theta$ XRD and RSM establish a solubility window. Layered tetradymite order persists up to ∼10 at.-% Cr, while higher doping yields CrTe/Cr₂Te₃ secondary phases. STEM reveals nanocrystalline layered stacking at low Cr and loss of long-range layering at higher Cr concentrations, consistent with XRD/RSM. Magnetometry on a 6% film shows soft ferromagnetism at 5 K. XAS and XMCD at the Cr $L_{2,3}$ edges exhibits a depth dependence: total electron yield (TE; surface sensitive) shows both nominal Cr²⁺ and Cr³⁺, whereas fluorescence yield (FY; bulk sensitive) shows a much higher Cr²⁺ weight. Sum rules applied to TEY give $m_L=(0.20\pm 0.04)$${\mu }_{\mathrm{B}}$/Cr, and $m_S=(1.6\pm 0.2)$${\mu }_{\mathrm{B}}$/Cr, whereby we note that the applied maximum field (3 T) likely underestimates $m_S$. These results define a practical growth window and outline key parameters for MTI films. Full article

Metal-oxide heterostructures represent an effective strategy to overcome the limitations of pristine TiO₂, including its ultraviolet-only light absorption and rapid electron–hole recombination, which hinder its performance in solar-driven applications. Among various configurations, coupling TiO₂ with tungsten oxide (WO_x) forms a favorable type-II band alignment that enhances charge separation. However, a comprehensive understanding of how WO_x overlayer thickness affects the optical and photoelectrochemical (PEC) behavior of device-grade thin films remains limited. In this study, bilayer TiO₂/WO_x heterostructures were fabricated via reactive DC magnetron sputtering, with controlled variation in WO_x thickness to systematically investigate its influence on the structural, optical, and PEC properties. Adjusting the WO_x deposition time enabled precise tuning of light absorption, interfacial charge transfer, and donor density, resulting in markedly distinct PEC responses. The heterostructure obtained with 30 min of WO_x deposition demonstrated a significant enhancement in photocurrent density under AM 1.5G illumination, along with reduced charge-transfer resistance and improved capacitive behavior, indicating efficient charge separation and enhanced charge storage at the electrode–electrolyte interface. These findings underscore the potential of sputtered TiO₂/WO_x bilayers as advanced photoanodes for solar-driven hydrogen generation and light-assisted energy storage applications. Full article

As a novel class of thin films, thin-film metallic glasses (TFMGs) hold broad application prospects in biomedicine, electronic components, etc. In this study, CuZr TFMGs were deposited at room temperature using a medium-frequency magnetron sputtering (MFMS) technique. The effects of bias voltage on the microstructure and properties of the films were systematically investigated. The results indicate that the CuZr system exhibits excellent glass-forming ability (GFA), with films possessing a smooth surface. As bias voltage increases, cross-sectional morphology transitions from a glassy morphology to a dimple-like structure. The high bias voltage induces reduced dimple size and significantly increased density. At a bias voltage of −50 V, the hardness of CuZr film reaches a maximum of 9.6 GPa. This hardness is approximately five times and twice that of pure Cu and Zr films, respectively. Compared with Zr film, CuZr TFMGs exhibit a significantly reduced friction coefficient while maintaining a low wear rate. All CuZr films demonstrate excellent electrical conductivity and hydrophobicity, providing the basis for future potential applications. Full article

This study examines the impact of varying pulse conditions on the properties of titanium diboride (TiB₂) coatings deposited by high-power impulse magnetron sputtering (HiPIMS). The coatings were prepared on steel substrates using an industrial-scale system. During the experiments, the HiPIMS frequency and pulse width were systematically varied to examine their influence on the coating’s microstructural, mechanical, and tribological properties. The obtained results show a correlation between process parameters and coating performance. A maximum hardness of 39.7 GPa and a coefficient of friction (CoF) as low as 0.68 were achieved. The best combination of mechanical properties was observed for coatings prepared in a frequency range of 600–1000 Hz and with a pulse width of 50 µs. Notably, the optimal tribological properties and surface roughness were obtained at 800 Hz and a 50 µs pulse width. This work demonstrates that fine-tuning HiPIMS pulse conditions is crucial for achieving high-quality TiB₂ coatings with enhanced functional performance. Full article

Palladium-based membranes for hydrogen separation offer the most promising gas permeation and selectivity, but their large-scale application has been limited due to the high environmental burdens and criticality of palladium. Herein, the possibility of substituting Pd with candidate elements in the composition of metallic micro-scale membranes (with permeability in the range of 5–50 × 10⁻¹² mol m^–1 Pa^–1 s⁻¹) deposited via High Power Impulse Magnetron Sputtering was investigated. This study proposed an innovative framework for a more comprehensive investigation of the sustainability challenges related to this lab-scale technology by integrating Life Cycle Assessment (LCA) and criticality analyses, thereby supporting materials selection efforts. First, the criticality status of several elements used in hydrogen separation membranes was screened with two different approaches. Furthermore, the environmental impacts of novel membrane compositions were compared with a high Pd-content reference membrane (Pd₇₇Ag₂₃) through cradle-to-gate LCA. For robust LCA modeling, uncertainty analysis was performed via Monte Carlo simulation, exploiting errors estimated for both primary and secondary data. A direct relationship was identified between the Pd content in membranes and the associated environmental impacts. VPd proved to be a promising candidate by exhibiting lower total impacts than the PdAg (65% or 71% considering thickness of 3.16 µm or permeance of 2.03 × 10⁻⁶ mol m⁻² Pa⁻¹ s⁻¹, respectively). Full article