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Open AccessArticle

Design, Characterization and Sensitivity Analysis of a Piezoelectric Ceramic/Metal Composite Transducer

Laboratory for the Design of Microsystems, Department of Microsystems Engineering (IMTEK), University of Freiburg, 79110 Freiburg, Germany
Author to whom correspondence should be addressed.
Micromachines 2017, 8(9), 271;
Received: 28 June 2017 / Revised: 13 August 2017 / Accepted: 31 August 2017 / Published: 5 September 2017
(This article belongs to the Special Issue Piezoelectric MEMS)
PDF [5523 KB, uploaded 6 September 2017]


This article presents experimental characterization and numerical simulation techniques used to create large amplitude and high frequency surface waves with the help of a metal/ceramic composite transducer array. Four piezoelectric bimorph transducers are cascaded and operated in a nonlinear regime, creating broad band resonant vibrations. The used metallic plate itself resembles a movable wall which can align perfectly with an airfoil surface. A phase-shifted operation of the actuators results in local displacements that generate a surface wave in the boundary layer for an active turbulence control application. The primary focus of this article is actuator design and a systematic parameter variation experiment which helped optimize its nonlinear dynamics. Finite Element Model (FEM) simulations were performed for different design variants, with a primary focus in particular on the minimization of bending stress seen directly on the piezo elements while achieving the highest possible deflection of the vibrating metallic plate. Large output force and a small yield stress (leading to a relatively small output stoke) are characteristics intrinsic to the stiff piezo-ceramics. Optimized piezo thickness and its spatial distribution on the bending surface resulted in an efficient stress management within the bimorph design. Thus, our proposed resonant transduction array achieved surface vibrations with a maximum peak-to-peak amplitude of 500 μ m in a frequency range around 1200 Hz. View Full-Text
Keywords: piezoelectric transducers; large stroke/high frequency vibrations; nonlinear duffing oscillator piezoelectric transducers; large stroke/high frequency vibrations; nonlinear duffing oscillator

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Mansoor, M.B.; Köble, S.; Wong, T.W.; Woias, P.; Goldschmidtböing, F. Design, Characterization and Sensitivity Analysis of a Piezoelectric Ceramic/Metal Composite Transducer. Micromachines 2017, 8, 271.

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