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Journal: Micromachines, 2015
Volume: 6
Number: 1442
Article:
Rounding of Negative Dry Film Resist by Diffusive Backside Exposure Creating Rounded Channels for Pneumatic Membrane Valves
Authors:
by
Philipp Frank, Sebastian Haefner, Georgi Paschew and Andreas Richter
Link:
https://www.mdpi.com/2072-666X/6/11/1442
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