Next Article in Journal / Special Issue
Controllable Active Micro Droplets Merging Device Using Horizontal Pneumatic Micro Valves
Previous Article in Journal / Special Issue
A Low-Cost, Normally Closed, Solenoid Valve for Non-Contact Dispensing in the Sub-µL Range
Article Menu

Export Article

Open AccessArticle
Micromachines 2013, 4(1), 22-33;

Compact Mass Flow Meter Based on a Micro Coriolis Flow Sensor

Bronkhorst High-Tech BV, 7261 AK Ruurlo, The Netherlands
Lionix BV, 7522 NH Enschede, The Netherlands
Micronit BV, 7521 PV Enschede, The Netherlands
Transducers Science and Technology, University of Twente, 7522 NH Enschede, The Netherlands
Author to whom correspondence should be addressed.
Received: 17 December 2012 / Revised: 5 February 2013 / Accepted: 8 February 2013 / Published: 1 March 2013
Full-Text   |   PDF [787 KB, uploaded 11 March 2013]   |  


In this paper we demonstrate a compact ready-to-use micro Coriolis mass flow meter. The full scale flow is 1 g/h (for water at a pressure drop < 1 bar). It has a zero stability of 2 mg/h and an accuracy of 0.5% reading for both liquids and gases. The temperature drift between 10 and 50 °C is below 1 mg/h/°C. The meter is robust, has standard fluidic connections and can be read out by means of a PC or laptop via USB. Its performance was tested for several common gases (hydrogen, helium, nitrogen, argon and air) and liquids (water and isopropanol). As in all Coriolis mass flow meters, the meter is also able to measure the actual density of the medium flowing through the tube. The sensitivity of the measured density is ~1 Hz.m3/kg. View Full-Text
Keywords: mass flow meter; Coriolis; microfluidics mass flow meter; Coriolis; microfluidics

Figure 1

This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

Share & Cite This Article

MDPI and ACS Style

Sparreboom, W.; van de Geest, J.; Katerberg, M.; Postma, F.; Haneveld, J.; Groenesteijn, J.; Lammerink, T.; Wiegerink, R.; Lötters, J. Compact Mass Flow Meter Based on a Micro Coriolis Flow Sensor. Micromachines 2013, 4, 22-33.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics



[Return to top]
Micromachines EISSN 2072-666X Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top