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Journal: Micromachines, 2025
Volume: 16
Number: 31

Article: The Effect of Metal Shielding Layer on Electrostatic Attraction Issue in Glass–Silicon Anodic Bonding
Authors: by Wenqi Yang, Yong Ruan and Zhiqiang Song
Link: https://www.mdpi.com/2072-666X/16/1/31

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