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Journal: Micromachines, 2025
Volume: 16
Number: 103
103
Article: Advancements in MEMS Micromirror and Microshutter Arrays for Light Transmission Through a Substrate
Authors: by Shilby Baby, Mustaqim Siddi Que Iskhandar, Md Kamrul Hasan, Steffen Liebermann, Jiahao Chen, Hasnain Qasim, Shujie Liu, Eslam Farrag, Dennis Löber, Naureen Ahmed, Guilin Xu and Hartmut Hillmer
Link: https://www.mdpi.com/2072-666X/16/1/103

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