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Journal: Micromachines, 2024
Volume: 15
Number: 1049
Article:
Resonant MEMS Accelerometer with Low Cross-Axis Sensitivity—Optimized Based on BP and NSGA-II Algorithms
Authors:
by
Jiaqi Miao, Pinghua Li, Mingchen Lv, Suzhen Nie, Yang Liu, Ruimei Liang, Weijiang Ma and Xuye Zhuang
Link:
https://www.mdpi.com/2072-666X/15/8/1049
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