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Journal: Micromachines, 2024
Volume: 15
Number: 1011
Article:
Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review
Authors:
by
Chenguang Xin, Yingkun Xu, Zhongyao Zhang and Mengwei Li
Link:
https://www.mdpi.com/2072-666X/15/8/1011
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