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Journal: Micromachines, 2024
Volume: 15
Number: 549
Article:
Optimization of Graphical Parameter Extraction Algorithm for Chip-Level CMP Prediction Model Based on Effective Planarization Length
Authors:
by
Bowen Ren, Lan Chen, Rong Chen, Yan Sun and Yali Wang
Link:
https://www.mdpi.com/2072-666X/15/4/549
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