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Journal: Micromachines, 2024
Volume: 15
Number: 1484
Article:
Design and Implementation of a CMOS-MEMS Out-of-Plane Detection Gyroscope
Authors:
by
Huimin Tian, Zihan Zhang, Li Liu, Wenqiang Wei and Huiliang Cao
Link:
https://www.mdpi.com/2072-666X/15/12/1484
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