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Journal: Micromachines, 2024
Volume: 15
Number: 1321

Article: Grayscale Lithography and a Brief Introduction to Other Widely Used Lithographic Methods: A State-of-the-Art Review
Authors: by Svetlana N. Khonina, Nikolay L. Kazanskiy and Muhammad A. Butt
Link: https://www.mdpi.com/2072-666X/15/11/1321

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